industrial 6 KW E.B.Gun system - electro optic applications
Electro beam gun system for Electro optic Applications. Source: Telemark 271 E.B.gun, four crucibles, 6 KW TT6 power supply Cryo pump: SHI APD 16" Marathon pump, 16,500 l/s. Ultimate pressure: 8x10-e8 mbar. 2x10-e7 mbar with in one hour. |
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Substrate holder: Full planetary, Step motor driven. Two precise angle positions .up to 28 substrats two inch each, or 84 substrats one inch each. Process control: automatic via PLC and Maxtek 360c deposition controller. Maxtek 360c programming and view on main touch screen. |
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Glow discharge: 2" diameter collimated glow discharge beam. 350 watt 3000 volt power supply. current voltage and time control via process receipt. Introducing gas system: One pneumatic Shut of valve for oxygen introducing (to be use with glow discharge). Heater: Four ceramic infra red heater enable substrates heating up to 250c. .Temperature, Rate and time receipt determined. |
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Control: Full automatic process control, PLC combined with PC control. Beckhoff PLC. Operation modes; Automatic mode, Manual mode and service mode, Graph screen with selecable time scale 5 min up to 30 days. GUI : Delphi on 17" Touch screen |
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