Indastrial E.B.Gun system
Source: Telemark 271 E.B.gun, four crucibles, 10 KW TT10 power supply.
Cryo pump: SHI APD 8" Marathon pump, 4,500 l/s.
Ultimate pressure: 8x10-e8 mbar.
Process control: automatic via PLC and Maxtek 360c deposition control. Maxtek 360c programming and view on main touch screen.