Thermal evaporator system for Nano applications.

Sources: Three boats, 3000 w, Automatic switching from software..

Power supply: 3000w 5v, 10v, 20v 40v, three position selector switch. 

Cryo pump: SHI APD 8" Marathon pump 4500 l/s.

Ultimate pressure: 7x10-e8 mbar.

Proces control: automatic via PLC and Maxtek 360c drposition controller

Control: Full automatic process control, PLC combined with PC control. Beckhoff PLC.

Operation modes; Automatic mode, Manual mode and service mode, Graph screen with selectable time scale 5 min up to 30 days.

HMI : Delphi on 17" Touch screen

Shutters: Lower shutter ,step motor driven with indexing option above the sources, top shutter, pneumatic driven close to the substrate

Heater: two 500 w halogen lamp ,heating up to 200c.