Our Product
  E.B.Gun systems
  Sputter systems
  Thermal evaporators
  DLC systems
  DLC Optical Applications 350mm
  DLC Optical Applications 425mm
  UHV Systems
  Vacuum furnace
  Pumping Station
  Porous Vacuum Chuck
 
  Parts clean
  Sub Assemblies
DLC systems
DLC Optical Applications 350mm

DLC Diamond like carbon system

Cathode: one main water cool high flow cathode, 350 mm diameter.

Power supply: 1250 w RF Comdel power supply combined with Comdel wide range automatic matching net work.

Turbo pump: Pfeiffer 2300 l/s Turbo pump combined with Pfeiffer DUO35 rotary vane pump.

Pressure control: Down stream control using motor controled gate valve combined with Setra Baratron.

Introducing gas system: Four mass flow controllers.

Process control: Full automatic via PLC and

System Control: Full automatic process control, PLC combine with PC control. Beckhoff PLC.


ODEM Scientific Applications - 3 Pakeris St. Rabin Park, Rehovot 76705, Israel
Tel: 972-8-9480780  Fax: 972-8-9480781 E-mail: odem@odemltd.co.il 		VSite  |  Tyco