Pumps : 1 x Pfeiffer 262 Turbo pump, 1 x Pfeiffer 071 Turbo pumps., 5 x ion pumps.

Gas intreducing : 4 MFC

Process control: automatic via PLC

System Control: Full automatic process control, PLC combine with PC control. Beckhoff PLC.

Operation modes; Automatic mode, Manual mode and service mode, Graph screen with selectable time scale 5 min up to 30 days.