Clean room High vacuum furnace up to 1000c
Chamber : 800mm ID 800mm length.
Ultimate vacuum 4x10-e8 mbar.
High vacuum pump – SHI APD 12" 9600L/S.
Process control: automatic via PLC ,programming and view on main screen. System includs Liquid Nitrogen trap. |
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System Control: Full automatic process control, PLC combined with PC control. Beckhoff PLC.
Gas Analyzer Pfeiffer vacuum PRISMA 1-200 AMU with EM Operation modes; Automatic mode, Manual mode and service mode, Graph screen with selectable time scale 5 min up to 30 days.
Programming options: Process time (vacuum dependable), Rate, un limited steps.
(Ending the process depended on selected AMU level). |
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