odem

Porous metal provides a flat, smooth, uniform surface for maximum hold down capability. These features eliminate both deflection and the tendency to produce a pattern on the work piece.
The standard grades used for vacuum applications are media grades 10 and 20. Discs can be manufactured up to an 8” diameter with typical flatness within 0.020”. Sheet can be manufactured in 8.5” and 10” widths and lengths

up to 36-40”. The typical flatness on sheet material as produced is about .100” to .125”. The flatness of both discs and sheet can be improved with secondary operations such as grinding and reactivating. Depending on the grade and design of the part, these procedures can bring the flatness to within 0.005” on a best effort basis.

Customers:
Semiconductor (chip/wafer manufacturers), Film manufacturers, Camera manufacturers
Applications:
- Semiconductor
Vacuum hold down for “chips” for subsequent manufacturing operations
Rotary vacuum chucks for the application of photo-sensitive liquid to substrate material for electronic and integrated circuitry components
- Film Manufacturing
Vacuum transfer platens on an automatic rotary index machine
Vacuum hold down for transporting film
- Camera Manufacturing
Vacuum Platen for an assembly operation

Advantages of Odem Porous vacuum chuck versus standard vacuum chuck:
- Conventional vacuum chucks and platens made from a series of interconnected slots with an external o-ring to maintain vacuum over the surface results in stress on the material being held down.
- Drilled holes in the vacuum chuck or platen surface produce a pattern on the thin film or other surface sensitive materials and holding power is limited due to the minimum vacuum area of the small holes.
Ceramics are susceptible to thermal shock.